Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion. With worked examples and over 100 in-text questions, this book will interest graduate students and researchers in applied physics and electrical engineering, helping them to develop physical arguments and mathematical analyses.


Format Inbunden Omfång 394 sidor Språk Engelska Förlag Cambridge University Press Utgivningsdatum 2011-02-24 ISBN 9780521763004